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Fabricated using silicon bulk micromachining technology |
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Built-in piezoelectric Tilt-Tip Stage |
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Different coatings available upon request |
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Standard micro machined deformable mirror with 15-mm clear
aperture, 17 actuators and integrated tip-tilt stage has been
specially designed for correction of low-order aberrrations.
The deformable mirror has the actuator geometry optimized for
the correction of the low-order aberrations, with 12 actuators
located outside of the working aperture of 10 mm, and is
mounted on a piezoelectric tip-tilt stage. This allows to avoid the
double use of the pupil-conjugated plane and to build compact
and simple adaptive optical systems.
The mirror has tip and tilt range of 24 µm at 10 mm aperture and
8.8 µm defocus range in the reflected wavefront.
Standard Specifications
| Aperture shape | approximately circular |
| Mirror coating | Al or Au |
| Aperture dimensions | 15 mm diameter |
| Number of electrodes | 17 |
| Control voltages Vc | 0 . . . 235 V |
| Initial RMS deviation from plane | less than 0.2 µm |
| Main initial aberration | 1.5 fringes at 630 nm |
| Maximum deflection of the mirror center | 9.4 µm |
Ordering
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